Aggressive media`s pressure measuring sensor arrangement, has sensor unit from thin substrate material and embeddedly provided in diaphragm, so that unit is arranged protectively with respect to main sides of diaphragm by diaphragm material

摘要

The arrangement (10) has a diaphragm (20) from a diaphragm material (25) e.g. Vespel (RTM: Not defined), polyimide and Teflon (RTM: Not defined), and a sensor unit (30). The sensor unit is embeddedly provided in the diaphragm in such a manner that the sensor unit is arranged protectively with respect to two main sides (21, 22) of the diaphragm by the diaphragm material. The sensor unit is made of thin substrate material e.g. semiconductor material, and is provided to be completely surrounded by the diaphragm material. An independent claim is also included for a method of manufacturing a sensor arrangement.