| 摘要 |
<p>Exposure equipment which can prevent a damage due to a flowed out liquid from expanding and highly perform exposure process and measuring process. Exposure equipment (EX) is provided with a movable table (PT), a base member (41) having an upper plane (41A) for guiding movement of the table (PT), and a detecting device (60) for detecting whether there is a liquid (LQ) on the upper plane (41A) of the base member (41) or not. ® KIPO & WIPO 2007</p> |
