| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet holding fixture which can prevent position deviation of sheet material in which a plurality of sheets are laminated. SOLUTION: The sheet holding fixture consists of a cover diaphragm 8 whose outer peripheral part is fixed to a cover frame body 7, a cove part 6 combined with the cover diaphragm 8, a base diaphragm 4 whose outer peripheral part is fixed to a base frame body 3, and a base part 2 disposed on the base diaphragm 4, and is provided with a vacuum pump for depressurizing a hermetic space formed by the cover part 6, the cover diaphragm 8, the base part 2, and the base diaphragm 4. The sheet material 30 is held in the depressurized hermetic space. Since the sheet material 30 is forcibly clamped by the cover part 6 and the base part 2, a plurality of sheets which are laminated can be prevented from generating position deviation. |
