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发明名称
Silicon thin film transistor and manufacturing method of gate insulator and the same adopting the method
摘要
申请公布号
KR100695154(B1)
申请公布日期
2007.03.14
申请号
KR20050052725
申请日期
2005.06.18
申请人
发明人
分类号
H01L29/786
主分类号
H01L29/786
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代理人
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