FILM FORMATION APPARATUS

摘要

A film forming apparatus is provided to enhance uniformity of thickness in a thin film and to improve the throughput by using a deposition source moving mechanism. A film forming apparatus includes a deposition source and a deposition source moving mechanism. The deposition source(104) has a length direction. The deposition source moving mechanism is used for moving the deposition source vertical to the length direction of the deposition source. The deposition source includes a deposition cell(103) with the length direction. The deposition source includes a plurality of deposition cells.