发明名称 METHOD AND DEVICE FOR MOUNTING CONDUCTIVE BALL
摘要 A method and a device for mounting conductive balls. The method comprises a step for setting, on a substrate (10), a mask (11) having a plurality of openings for disposing the conductive balls on the substrate (10) and a filling step for holding the group of conductive balls in a part of a district (26) on the surface of the mask by a head (20) moving along the surface of the mask (11) and moving the district (26) so that the route (71) of the district (26) is partly overlapped with each other. Since the filled district (26) is limited and moved while collecting the conductive balls in the district (26), the loss of the conductive balls can be suppressed, a filling efficiency can be increased, and erroneous filling can be suppressed. ® KIPO & WIPO 2007
申请公布号 KR20070029764(A) 申请公布日期 2007.03.14
申请号 KR20067027841 申请日期 2005.06.30
申请人 ATHLETE FA CORPORATION 发明人 NEBASHI TORU;KAWAKAMI SHIGEAKI
分类号 H01L21/60 主分类号 H01L21/60
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