发明名称 |
CARBURETOR, VARIOUS TYPES OF DEVICES USING THE CARBURETOR, AND METHOD OF VAPORIZATION |
摘要 |
To provide a vaporizer which can be used long time without blockage, and possible to stably supply raw materials to reaction part. <??>A gas passage 2 formed inside of main body of a dispersion part 1, a gas inlet opening 4 to introduce pressurized carrier gas 3 into gas passage 2, a means 6 to supply raw material solution 5 to carrier gas passing gas passage 2, a gas outlet 7 to send carrier gas including dispersed raw material solution 5 to vaporization part 22, a dispersion part 8 to flow through gas passage 2 having means 18 to cool, a vaporization pipe 20 connected with a reaction part and gas outlet 7 of dispersion part 8 of the device, and a heater 21 to heat vaporization pipe 20 is provided, a vaporization part 22 to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion 102 having small hole 101 for the outside of gas outlet 7 is provided. <IMAGE> |
申请公布号 |
EP1361610(A4) |
申请公布日期 |
2007.03.14 |
申请号 |
EP20020715811 |
申请日期 |
2002.01.18 |
申请人 |
KABUSHIKI KAISHA WATANABE SHOKO;TODA, MASAYUKI |
发明人 |
TODA, MASAYUKI;FUKAGAWA, MITSURU;UMEDA, MASARU;FUKAGAWA, MITSURU |
分类号 |
H01L23/31;B01B1/00;B01D1/16;B01D3/34;B01F3/04;B01F5/06;C23C16/40;C23C16/448;H01L21/02;H01L21/316;H01L21/8246;H01L27/115 |
主分类号 |
H01L23/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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