| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which can surely prevent transfer the mist of processing liquid to the upper face side of a substrate and convolving of the processing liquid thereto in processing the substrate by feeding the processing liquid to the lower face of the substrate, while rotating the substrate. SOLUTION: This substrate-processing apparatus is constituted, such that the support members 12 on a rotary base 10 is engaged with the substrate, so that the substrate W will not move horizontally and will not rotate with respect to the rotary base, while the substrate is allowed to move vertically, and a proximate suction plate 34, whose lower face is formed in a plane parallel to the substrate on the rotary base, is arranged in the upper part of the rotary base. The proximate suction plate 34 sucks the substrate in proximity by the Bernoulli effect, by blowing a gas over the entire circumference downward and outward to the upper face side of the substrate. |
