INTEGRATED ELECTRONIC HARDWARE FOR WAFER PROCESSING CONTROL AND DIAGNOSTIC
摘要
<p>A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.</p>
申请公布号
EP1295316(B1)
申请公布日期
2007.03.14
申请号
EP20010950693
申请日期
2001.06.29
申请人
LAM RESEARCH CORPORATION
发明人
NGO, TUAN;KAVEH, FARRO;LAM, CONNIE;HUANG, CHUNG-HO;NI, TUQIANG;LE, ANTHONY, T.;SALKOW, STEVEN