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发明名称
PROCESS FOR PRODUCTION OF ETCHING OR CLEANING FLUIDS
摘要
申请公布号
KR100695246(B1)
申请公布日期
2007.03.14
申请号
KR20057017187
申请日期
2005.09.14
申请人
发明人
分类号
C09K13/00;C11D7/32;C11D7/04;C11D7/06;C11D7/08;C11D7/10;C11D7/26;C11D11/00;C11D17/08;H01L21/02;H01L21/304;H01L21/306;H01L21/308
主分类号
C09K13/00
代理机构
代理人
主权项
地址
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