发明名称 DEPOSITION METHOD AND METHOD OF MANUFACTURING AN ORGANIC COMPOUND ELEMENT
摘要 <p>A deposition method and a method for manufacturing an organic compound element are provided to decrease a driving voltage and have a long life span by improving a carrier injection between organic layers. A deposition method includes the steps of: forming a first functional region(210) having a first organic compound(204a) by performing a vacuum deposition from a first deposition source(203a) in a deposition chamber; forming a first mixed region(211) having the first and second organic compounds(204a,204b) by simultaneously performing the vacuum deposition from the first and second deposition sources(203a,203b) in the deposition chamber; forming a second functional region(212) having the second organic compound(204b) by performing the vacuum deposition from the second deposition source(203b) except the first deposition source(203a) in the deposition chamber; forming a second mixed region(213) having the second and third organic compounds(204b,204c) by simultaneously performing the vacuum deposition from the second and third deposition sources(203b,203c) except the first deposition source(203a) in the deposition chamber; and forming a third functional region(214) having the third organic compound(204c) by performing the vacuum deposition from the third deposition source(203c) except the first and second deposition sources(203a,203b) in the deposition chamber.</p>
申请公布号 KR20070029768(A) 申请公布日期 2007.03.14
申请号 KR20070006068 申请日期 2007.01.19
申请人 SEMICONDUCTOR ENERGY LABORATORY K.K. 发明人 YAMAZAKI SHUNPEI;SEO SATOSHI;MIZUKAMI MAYUMI
分类号 H05B33/10;B05D7/24;C23C14/12;C23C14/56;H01L51/00;H01L51/40;H01L51/50;H05B33/02;H05B33/12 主分类号 H05B33/10
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