| 发明名称 |
ULTRAVIOLET-TRANSPARENT ALKANES AND PROCESSES USING SAME IN VACUUM AND DEEP ULTRAVIOLET APPLICATIONS |
| 摘要 |
The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength. ® KIPO & WIPO 2007 |
| 申请公布号 |
KR20070029731(A) |
申请公布日期 |
2007.03.14 |
| 申请号 |
KR20067025260 |
申请日期 |
2006.11.30 |
| 申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
FRENCH ROGER HARQUAIL;PENG SHENG;WHELAND ROBERT CLAYTON |
| 分类号 |
C07C9/14;G03B27/52;G03B27/54;G03C5/00;G03F7/20 |
主分类号 |
C07C9/14 |
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