BOAT FOR TRANSFERRING WAFERS

摘要

A wafer transfer boat is provided to restrain the damage of a boat bar by forming roundly a corner portion of the boat bar. A wafer transfer boat is used for transferring a plurality of wafers. The wafer transfer boat is composed of a plurality of boat bodies and a plurality of boat bars. The plurality of boat bodies(57) are spaced apart from each other. The plurality of boat bars(60) are horizontally prolonged from the boat bodies, respectively. The boat bar has a plurality of corner portions. Each corner portion has a round type shape. The boat bar is formed like a rectangle type pillar. The thickness of the boat bar becomes smaller and smaller from the boat body.