发明名称 |
MOBILE TYPE DIE CLEANING APPARATUS AND DIE CLEANING METHOD USING PLASMA |
摘要 |
A movable mold cleaning apparatus and a mold cleaning method are provided to remove easily resin residues from a cavity of a mold without the separation of the mold using an enhanced frame structure. A movable mold cleaning apparatus includes a frame and an active electrode. The frame(10) has a lower opening portion. The frame is capable of forming a reaction chamber. The active electrode(20) generates plasma in the reaction chamber. The active electrode is applied with power from an external power source. The frame is composed of a box type body frame(12) for installing the active electrode and a frame type attach frame(14) under the box type body frame. A sealing packing is interposed between the attach frame and the body frame. |
申请公布号 |
KR20070027192(A) |
申请公布日期 |
2007.03.09 |
申请号 |
KR20050082569 |
申请日期 |
2005.09.06 |
申请人 |
P.S.M CO., LTD. |
发明人 |
KIM, DUK JAE;LEE, HAE RYONG;OH, JUNG KEUN;LEE, KEUN HO;KIM, DO HYUN |
分类号 |
H01L21/02;H01L21/56;H01L23/28 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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