发明名称 MOBILE TYPE DIE CLEANING APPARATUS AND DIE CLEANING METHOD USING PLASMA
摘要 A movable mold cleaning apparatus and a mold cleaning method are provided to remove easily resin residues from a cavity of a mold without the separation of the mold using an enhanced frame structure. A movable mold cleaning apparatus includes a frame and an active electrode. The frame(10) has a lower opening portion. The frame is capable of forming a reaction chamber. The active electrode(20) generates plasma in the reaction chamber. The active electrode is applied with power from an external power source. The frame is composed of a box type body frame(12) for installing the active electrode and a frame type attach frame(14) under the box type body frame. A sealing packing is interposed between the attach frame and the body frame.
申请公布号 KR20070027192(A) 申请公布日期 2007.03.09
申请号 KR20050082569 申请日期 2005.09.06
申请人 P.S.M CO., LTD. 发明人 KIM, DUK JAE;LEE, HAE RYONG;OH, JUNG KEUN;LEE, KEUN HO;KIM, DO HYUN
分类号 H01L21/02;H01L21/56;H01L23/28 主分类号 H01L21/02
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