MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING CHIP

摘要

A mold, a print method and a chip manufacturing method are provided to enhance the precision of arrangement between the mold itself and a work. A mold includes a substrate and an alignment mark. The substrate(2010) contains a first material. The alignment mark is arranged on the substrate. The alignment mark contains the first material and a second material. The first and second materials have the transmissivity on at least a portion of a wavelength range in an ultraviolet ray. The second material has a predetermined refractive index range of 1.7 or more. A predetermined member(2102) of the alignment mark is arrange on the substrate in order to modify the thickness of the mold, wherein the predetermined member is made of the second material.