发明名称 |
METHOD AND APPARATUS FOR FORMING A PATTERN, DEVICE AND ELECTRONIC APPARATUS |
摘要 |
A method for forming a pattern on a substrate, including the steps of: ejecting liquid drops from an ejection head having nozzles onto a reference plate on which a plurality of target positions are defined, the target positions being arranged in at least one row; detecting an amount of a displacement between the target positions and the positions at which the liquid drops have actually landed; determining a relative positional error relative to the ejection head for each of the at least one row of the target positions based on the amount of the displacement; determining a correction value for each of the at least one row based on the relative positional error; and sequentially changing a relative position of the substrate and the ejection head based on the corrections values when the liquid drops are being ejected onto the substrate. |
申请公布号 |
KR100691699(B1) |
申请公布日期 |
2007.03.09 |
申请号 |
KR20050002419 |
申请日期 |
2005.01.11 |
申请人 |
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发明人 |
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分类号 |
H01L21/027;H04R9/02;B05C5/00;B05C11/00;B05D3/00;B05D7/00;B29C65/52;B41J2/01;G06F11/30;H01L51/50;H04R1/06;H04R9/06;H04R31/00;H05B33/10;H05B33/14 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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