METHOD FOR FABRICATING OF WIRE GRID POLARIZER

摘要

A method of manufacturing a wire grid polarizer is provided to fabricate a wire grid polarizer having a high polarization extinction ratio through a simple process using microcontact lithography and atomic layer deposition without using an exposure process and an etch process. A plurality of patterns are formed of a self assembly monolayer material(210b) on a substrate(300). The self assembly monolayer inhibits the formation of a metal layer. A metal thin film(400) is deposited between neighboring patterns. The plurality of patterns are formed using microcontact lithography. The metal thin film is formed using atomic layer deposition.