FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE,申请号KR20050003597-传众专利搜索

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发明名称	FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE
摘要
申请公布号	KR100689920(B1)	申请公布日期	2007.03.09
申请号	KR20050003597	申请日期	2005.01.14
申请人		发明人
分类号	G03F7/16;H01L21/20;B05C9/12;B05C13/00;B05D3/00;B05D3/02;G02F1/136;G03F7/09;G03F7/11;G03F7/26;G03F7/38;H01L21/00;H01L21/027;H01L21/312;H01L21/469	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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