| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To manufacture a multilayer ceramic substrate having superior dimensional accuracy and flatness of a bottom surface of a cavity. <P>SOLUTION: A conductor pattern 12 is formed on a bottom-surface-forming green sheet 32 while bridging the peripheral part of the bottom surface of the cavity 11. A first cavity-forming green sheet 26 in which a contraction-suppressing material green sheet piece 25 is buried in a through hole and a second cavity-forming green sheet 30 which is laminated just above the first cavity-forming green sheet 26 and has a burying green sheet 30a while burying the cavity 11 are formed. The first cavity-forming green sheet 26 is laminated just above the bottom-surface-forming green sheet 32 and the second cavity-forming green sheet 30 is laminated just above the first cavity-forming green sheet 26 so that the bottom surface of the cavity 11, the contraction-suppressing material green sheet piece 25 and the burying green sheet 30a are overlaid, to obtain a laminate 33. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
