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经营范围
发明名称
Lift Apparatus of Semiconductor Manufacturing Equipment and Driving Method
摘要
申请公布号
KR100689820(B1)
申请公布日期
2007.03.08
申请号
KR20040098891
申请日期
2004.11.29
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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