PROBE, ITS MANUFACTURING METHOD, CONTACT DEVICE USING PROBE, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent wear of a probe 6 of a type where the metal probe 6 defining a contactor is arranged on a wiring film 10 on a wiring substrate 4 from reducing electrical connection with an electrode of a measured electronic device or the like. SOLUTION: The probe 6 coming into contact with the electrode of the measured body is formed of a laminated metal structure in which second metal films 32 and 32 made of a precious metal such as gold are formed on both sides of a first metal film 30. The plane pattern (shape) has at least a base 34 defining an end on the side of the wiring substrate and a ring-like elastic section 36. The probe 6 is connected onto a probe connection region 12 of the wiring film 10 of the wiring substrate 4 at the base 34 via a metal film (for example, tin or solder) 24 for connecting the probe. COPYRIGHT: (C)2007,JPO&INPIT