| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film pressure sensor for preventing a poor weld of a diaphragm. SOLUTION: This thin-film pressure sensor is equipped with a sensor housing with a detected pressure transmitted thereto and a bottomed-cylindrical metal-made diaphragm 30 welded over its entire circumference to the sensor housing. This pressure sensor comprises a sensor part 20 formed by deposition on a surface of the diaphragm 30. In this pressure sensor, a flange part 35 is formed so as to project from the periphery of the diaphragm 30, while rotary locking recessed parts 36 are formed so as to recessedly fall in the flange part 35. In a deposition process for forming the sensor part 20, pins 45 of a tool 40 are inserted into the recessed parts 36 to position the diaphragm 30. COPYRIGHT: (C)2007,JPO&INPIT
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