IMPEDANCE MATCHING APPARATUS FOR USING RF MATCHER

摘要

An impedance matching apparatus used in an RF(Radio Frequency) matcher is provided to prevent a life-span reduction due to loss of an RF match arc and a ground by enhancing a ground method for high power use. In an impedance matching apparatus used in an RF matcher, a shaft fixing screw(22) is assembled to a fixed jig(21) to prevent a blade shaft from shaking for assembling a fixed blade(11) and a variable blade(12). A ground wheel(23) is installed on the shaft fixing screw(22). The ground wheel(23) is coupled to a ground wheel aligner(27). A cylindrical elastic spring(25) is installed on the ground wheel(23) for applying elasticity to a shaft. A ground bearing(26) is assembled to the elastic spring(25). The ground bearing(26) is composed of a ground disk.