发明名称 COOLING DEVICE
摘要 A cooling apparatus is provided to operate continuously the cooling apparatus itself for a long time by adsorbing the moisture of a coolant enough using a moisture adsorbing filter. A cooling apparatus comprises a supply line(31) for flowing a coolant, a collection line(32) for collecting the coolant, a pump(33) between the collection line and the supply line, a heat exchanger(34) for cooling the coolant in a first aiming temperature range on the supply line or the collection line, a refrigerator(35) for cooling the heat exchanger, the branch line(36) between the supply line and the collection line, a heater(37) for heating the coolant in a second aiming temperature range on the branch line, and a moisture adsorbing filter. The moisture adsorbing filter(38) is installed on the branch line to adsorb the moisture of the coolant.
申请公布号 KR20070026009(A) 申请公布日期 2007.03.08
申请号 KR20060075282 申请日期 2006.08.09
申请人 NISHIYAMA CORPORATION 发明人 KAWAI MASAHIRO;FUJINO YOJI;ARAI SOMEYOSHI
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
主权项
地址