Method for forming metal oxide coating film and vapor deposition apparatus

摘要

A photocatalytic composite material having a photocatalytic titanium oxide film on the surface of a substrate is produced by a CVD method in which TiCl₄ vapor is reacted with water vapor. The TiCl₄ vapor and the water vapor are injected into a vapor deposition chamber ( 9 ) through nozzles ( 5 ) and ( 6 ), respectively, such that the resulting two injected vapor streams meet before reaching the substrate, thereby mixing the two vapors. Within 3 seconds after this mixing, the mixed vapors are brought into contact with a substrate ( 1 ) which is moving in one direction. Preferably the TiCl₄ vapor is injected in a reverse direction with respect to the direction of movement of the substrate through a multi-orifice nozzle ( 5 ), while the water vapor is injected through a slit nozzle ( 6 ) disposed at a smaller angle with respect to the substrate.