发明名称 |
LAMINATE POLISHING PAD |
摘要 |
Disclosed is a method for production of a laminate polishing pad which comprises a reduced number of steps and is excellent in productivity rate, and which causes no detachment between a polishing layer and a cushion layer and can prevent the gutter clogging caused by a slurry or the like. Also disclosed is a laminate polishing pad produced by the method. A method for production of a laminate polishing pad comprising the steps of preparing a gas bubble-dispersed urethane composition by a mechanical floss process, ejecting the composition onto a cushion layer continuously while feeding the cushion layer, curing the composition while controlling the thickness of the composition evenly to form a polishing layer comprising a polyurethane foam, thereby producing a long laminate sheet, and cutting the sheet. |
申请公布号 |
WO2007026610(A1) |
申请公布日期 |
2007.03.08 |
申请号 |
WO2006JP316699 |
申请日期 |
2006.08.25 |
申请人 |
TOYO TIRE & RUBBER CO., LTD.;HIROSE, JUNJI;DOURA, MASATO |
发明人 |
HIROSE, JUNJI;DOURA, MASATO |
分类号 |
B24B37/20;B24B37/24;H01L21/304 |
主分类号 |
B24B37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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