| 摘要 |
A test piece holder for observing the cross-section of a semiconductor substrate is provided to perform quickly an observation on the cross-section of a test piece and to improve the exactness of a test piece measuring process. A test piece holder for observing the cross-section of a semiconductor substrate includes a mount holder(10), a mount, and a test piece. The mount(12) is installed on an upper surface of the mount holder. The test piece(14) is installed at one upper side of the mount. A loading groove is formed at an upper center portion of the mount holder to load stably the mount. The loading groove has the same shape as that of the mount.
|
