| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer film reflector having a total film stress uniform and minimum over the entire deposited film surface. <P>SOLUTION: The multilayer film reflector has a first light reflector (A1) composed of paired laminated layer each comprising a molybdenum-containing layer (105) and a silicon-containing layer (103), and a second part (B1, B2) composed of layers so constituted as to cancel the stress the first part has on a substrate. The constitution of the layers of the second part is so changed as to cancel the stress of the first part according to the distribution of the stress over a plane parallel to the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT |
