| 摘要 |
PROBLEM TO BE SOLVED: To provide a microsensor for analysis which forms a capturing means on only either of two electrodes only by allowing medical fluid to flow in a structure formed by bonding a piezoelectric vibrator onto a fluid, and performing highly accurate measurement even when a reference vibrator and a detection vibrator are arranged close to each other. SOLUTION: A groove is provided on the piezoelectric substrate surface constituting one side face of the passage, and a counter electrode is provided on the counter surface. A detection electrode is provided on the upper surface of the groove, and a reference electrode is provided on the bottom surface, and the side wall surface of the groove is constituted so as to be hydrophobic. When water-soluble medical fluid is sent into the passage, bubbles remain in the groove, and only the detection electrode is dipped into the medical fluid. Hereby, an adsorption film for capturing a specific material onto the detection electrode surface can be formed only by a process for sending the medical fluid, and simultaneously a fluctuation caused by a temperature change is detected from a signal of the piezoelectric vibrator measured by switching between the reference electrode and the detection electrode, and thereby even if the ambient temperature is changed, the mass of the specific material adhering onto the detection electrode is measured highly accurately. COPYRIGHT: (C)2007,JPO&INPIT
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