| 摘要 |
PROBLEM TO BE SOLVED: To provide a distilled water supply system which does not contaminate a distilled water tank even if internal leak or the like occurs in a heat exchanger. SOLUTION: The distilled water is supplied from distilled water supply paths 8A, 8B and 8C attached to the bottom part of first to third distilled water tanks 7A, 7B and 7C to a use point (UP) through a distilled water pump 9, and residual distilled water is recirculated to a recirculation path 11. This recirculation path 11 is provided halfway with a distilled water heater 12. Thereafter, the recirculation path 11 branches into branch pipe conduits 14A, 14B and 14C, and a blow discharge pipe 15. Each of the branch pipe conduits 14A, 14B and 14C communicates with the first to third distilled water tanks 7A, 7B and 7C. Then, the distilled water heater 12 is provided with a pressure indication alarm (PICA). From these data, a controller 18 controls the recirculation path 11 to the branch pipe conduits 14A, 14B and 14C side, and the blow discharge pipe 15 side. COPYRIGHT: (C)2007,JPO&INPIT
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