发明名称 SILICA GLASS CRUCIBLE WITH BARIUM-DOPED INNER WALL
摘要 A silica glass crucible includes a thin barium-doped inner layer, a stable, bubble-free intermediate layer, and a stable opaque outer layer. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica. The crucible demonstrates reduced bubble growth during a Czochralski process. As a result of the thin barium-doped layer and the reduced bubble growth, the inner surface of the crucible is uniformly minimally textured during a CZ process. The present crucible is especially suited for intense CZ processes for manufacturing silicon ingots used for solar cells or with silicon that is heavily doped with antimony, boron, or arsenic.
申请公布号 US2007051297(A1) 申请公布日期 2007.03.08
申请号 US20060536517 申请日期 2006.09.28
申请人 HERAEUS SHIN-ETSU AMERICA, INC. 发明人 KEMMOCHI KATSUHIKO;OHAMA YASUO
分类号 C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04 主分类号 C30B15/00
代理机构 代理人
主权项
地址