发明名称 |
Methods of and apparatuses for maintenance, diagnosis, and optimization of processes |
摘要 |
One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.
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申请公布号 |
US2007055403(A1) |
申请公布日期 |
2007.03.08 |
申请号 |
US20050179440 |
申请日期 |
2005.07.11 |
申请人 |
MACDONALD PAUL D;KRUGER MICHIEL V;WELCH MICHAEL;FREED MASON L;SPANOS COSTAS J |
发明人 |
MACDONALD PAUL D.;KRUGER MICHIEL V.;WELCH MICHAEL;FREED MASON L.;SPANOS COSTAS J. |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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