发明名称 METHOD AND APPARATUS FOR SUPPLYING LIQUID DROP
摘要 <P>PROBLEM TO BE SOLVED: To solve the following problems: an Sn compound is inevitably applied by mixing with water because it does not dissolve in water, a substance with heavy specific gravity, such as the Sn compound (SnO<SB>2</SB>, 6.5 g/cm<SP>3</SP>), easily settles in water at the settling velocity of 3&times;10<SP>-4</SP>m/s to produce precipitation when it has the particulate diameter of 10 &mu;m, and thus, when solid particulates are mixed with water and are applied as liquid, it is required that the liquid to be applied is sufficiently stirred in an envelope and dealt as liquid in pseudo uniform state. <P>SOLUTION: Ultrasonic wave dipersion is usable to disperse the Sn compound to produce suspension. When SnO<SB>2</SB>particulates having the center of particle size distribution of primary particle diameter of 30 nm are mixed with water at weight ratio up to 7.5%, the particle size distribution can be made into several 10 &mu;m to not more than 100 nm (not more than measurement limit) by irradiating for one minute using an ultrasonic dipersion machine having an ultrasonic nozzle of &psi;36 mm and output of 330 W. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007059373(A) 申请公布日期 2007.03.08
申请号 JP20060010846 申请日期 2006.01.19
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 YASHIRO HIDEHIKO
分类号 H05G2/00;G21K5/08;H01L21/027 主分类号 H05G2/00
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