PLASMA GENERATION MODULE, AND PLASMA GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a plasma generation module which can be downsized.

SOLUTION: The plasma generation module 40 comprises a hearth 42 to function as an anode, magnets 44 arranged around the hearth 42, and a plasma gun 46 arranged above a return flux F formed within a chamber 20 by the magnets 44.

COPYRIGHT: (C)2007,JPO&INPIT