| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a large substrate, having high dimensional accuracy in a chamfered part on an end face of the substrate and easily assembled in an exposure apparatus, and to provide a method for manufacturing the substrate. <P>SOLUTION: The large substrate has the diagonal length of 500 mm or larger and within±0.05 mm dimensional accuracy of a chamfered width (C-chamfering) on the upper and lower faces of the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
