| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device and a substrate inspection method which are capable of shortening the time required for inspecting a substrate, while imposing thermal stress on an inspected substrate. SOLUTION: The substrate inspection device is equipped with a cooling holding unit 22 provided with a cooling plate 221 that cools a substrate 8 to be inspected, a heating holding unit 24 provided with a heating plate 241 that heats the inspected substrate 8, a transfer unit 32 which transfers the inspected substrates 8 in a predetermined order to the placement area of the cooling plate 221 and the heating plate 241, and movable probes 37 and 38, which inspect the inspected substrate 8 that is cooled by the cooling holding unit 22 and the inspected substrate 8 heated by the heating holding unit 24, respectively. COPYRIGHT: (C)2007,JPO&INPIT
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