| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical sensor that prevents damages of electrodes and electrode wiring in a closed chamber. <P>SOLUTION: Detecting electrodes 25a, 25b that detect the displacement of a weight section 23 and a gaseous molecule absorbing material 30 of the same material as the electrodes are provided on the inside surface of glass substrates 20, 21 with which the closed chamber is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
