| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coater ensuring constant feeding of a coating solution and reducing vibration generated during movement of the slit nozzle. <P>SOLUTION: A tube-phragm pump 12 which is operated by applying, with an incompressible fluid, a uniform pressure to the outer periphery of the tube is arranged as a coating solution supplying pump in the central part of a forward connection beam 7 in the transverse direction with respect to the coating direction. The tube-phragm pump 12 is fixed obliquely to a wedge member 13 attached to the upper surface of the connection beam 7 so that the outlet is positioned upward and the inlet downward. The oblique arrangement prevents entrainment of air. To prevent dripping etc., the coater preferably has no trap in the inlet or the outlet. <P>COPYRIGHT: (C)2007,JPO&INPIT |
