| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspecting device which secures an S/N ratio required for inspection of a surface defect by certainly removing diffracted light. SOLUTION: The surface defect inspecting device comprises: an illumination unit 10 for illuminating a surface 5a to be inspected with linear polarized light; and a light-receiving unit 20 for receiving a polarized component perpendicular to the vibration plane of the linear polarized light of scattered light coming from the surface 5a to be inspected when it is illuminated by the linear polarized light. Assuming that the outgoing angle of regular reflection light outgoing from the surface to be inspected when it is illuminated by the linear polarized light isθo, the angle of aperture of the regular reflection light isδθo, the angle of the optical axis C3 of the regular reflection light with respect to the optical axis C4 of the light-receiving unit isθr, and the angle of aperture of the light-receiving unit isδθr, the light-receiving unit is set to establish the condition expressions "δθo<(θr-δθr)", "θr≤10°", and "θo≤60°". COPYRIGHT: (C)2007,JPO&INPIT
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