| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device capable of accurate detection of a pressure and a temperature without being influenced by an ambient temperature change. SOLUTION: This surface acoustic wave device wherein a part of semiconductor substrate is formed thinly and surface acoustic wave elements are formed thereon is equipped with the surface acoustic wave elements 20, 21 for exciting different frequencies, oscillation circuits 31, 36 for exciting each element, F/V conversion circuits 32, 37 for converting each oscillation frequency into a voltage and outputting it, a storage device 34 for storing data on the oscillation frequencies at a temperature and a pressure used as a reference and data on a temperature coefficient and a pressure coefficient, comparison circuits 33, 38 for comparing data on the oscillation frequencies and outputting its difference, and an operation circuit 39 for operating and outputting data on a temperature and a pressure at the temperature used as a reference based on data output from the comparison circuits 33, 38 and the data on the temperature coefficient and the pressure coefficient output from the storage device 34, and outputting the result. COPYRIGHT: (C)2007,JPO&INPIT
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