| 摘要 |
PROBLEM TO BE SOLVED: To improve the lateness of the sensing response of a conventional single catalytic metal film in an optical gas sensor constituted of a multilayered structure of a metal oxide film and a catalytic metal film. SOLUTION: The conventional single catalytic metal film is formed as a metal catalyst film comprising an alloy or a two-layered structure comprising a combination of palladium Pd and ruthenium Ru, palladium Pd and platinum Pt or palladium Pd and rhodium Rh. By this constitution, an optical change per a unit time is utilized in sensing by utilizing the effect that a change in optical characteristics with respect to a sensing exposure time is almost expressed as a linear function. As a result, the sensing response requiring the time (about 200 sec) reaching adsorption equilibrium heretofore can be improved to the high-speed sensing of 0.1-1 sec. COPYRIGHT: (C)2007,JPO&INPIT
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