发明名称 |
METHOD FOR PRODUCING SINGLE CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a single crystal where a single crystal film whose thickness variation is little and which has superior surface flatness can be produced on a substrate by liquid phase epitaxial growth. SOLUTION: A plurality of raw materials are supplied in a crucible 2. The substrate 7 is dipped in a solution 9 in which a plurality of the raw materials are dissolved. When the single crystal film is grown on the surface of the substrate by a liquid phase epitaxial method, a shielding plate 10 to suppress the upward movement of crystal particles 9a generated in the solution 9 is placed lower than the height of the substrate 7 dipped in the solution 9. The method for producing the single crystal where the single crystal film is grown on the surface of the substrate 7 is provided. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2007055838(A) |
申请公布日期 |
2007.03.08 |
申请号 |
JP20050242348 |
申请日期 |
2005.08.24 |
申请人 |
TOHOKU UNIV;MURATA MFG CO LTD;MITSUBISHI GAS CHEM CO INC |
发明人 |
DIRK EHRENTRAUT;FUKUDA TSUGUO;SATO HIDETO;MIYAMOTO YOSHIYUKI |
分类号 |
C30B19/02;C30B29/16 |
主分类号 |
C30B19/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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