| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device which makes accurate positioning and is made compact. SOLUTION: The positioning device is equipped with: a bearing 3 secured to the undersurface of a table 2 and supporting the table 2 floating from a base 1; a first straight guiding bearing 5 installed on one side face 2a extending in the X-direction of the table 2 and guiding the table 2 movably in the X-direction; a first actuator 6 to advance and retreat the bearing 5 in the Y-direction; a first energizing means 10 installed on the opposite side face 2b, admitting movement of the table 2 in the X-direction, and energizing the table 2 toward the bearing 5; a second straight guiding bearing 7 installed on side face 2c extending in the Y-direction of the table 2 and guiding the table 2 movably in the Y-direction; a second actuator 8 to advance and retreat the bearing 7 in the X-direction; and a second energizing means 20 installed on the side face 2d on opposite side, admitting movement of the table 2 in the Y-direction, and energizing the table 2 toward the bearing 7. COPYRIGHT: (C)2007,JPO&INPIT
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