| 摘要 |
PROBLEM TO BE SOLVED: To provide a powder recovery device capable of performing recovery and reuse of a material particle easily and efficiently. SOLUTION: The film forming system is provide in which a powder recovery device 30 is connected to a system body 10, and a recovery wall portion 32 is provided in a separation tank 31, and a material particle M that is contained in an aerosol Z hits on the recovery wall portion 32 and adheres thereon, and is thereby separated from a gas, at the time when since a collision surface of the material particle M with the aerosol Z is made to be an inclined surface 33 in the recovery wall portion 32, collision energy of the material particle M on the inclined surface 33 becomes small and the material particle M adheres on the recovery wall portion 32 with weak adhesion, whereby the material particle M can be easily stripped from the recovery wall portion 32 and provided for reuse. COPYRIGHT: (C)2007,JPO&INPIT
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