HIGH-FREQUENCY POWER APPARATUS

摘要

A high-frequency power apparatus is provided to improve conversion efficiency of an amplifier from a DC power to a high-frequency power by controlling a value of the high-frequency power supplied to a load to be equal to an output power setting value. An oscillator(13) outputs an oscillation signal with a varying output level. An amplifier(14) outputs high frequency output by amplifying the oscillation signal from the oscillator. A DC power supply unit(19) supplies a DC power with a varying output level to the amplifier. A high frequency power measurement unit measures a power value of the high frequency power at an output port of a high frequency power unit and then outputs the measured power value as a high frequency power measurement value. A DC power measurement unit(20) measures a power value of the DC power supplied to the amplifier, and then outputs the measured DC power value as a DC power measurement value. A first controller(12) controls an output level of the oscillation signal outputted from the oscillator in order for the high frequency power measurement value to be equal to an output power setting value. A second controller(18) controls an output level of the DC power supplied to the amplifier from the DC power supply unit.