SPIN CHUCK

摘要

A spin chuck is provided to prevent generation of vortex flow due to a flat zone of a substrate by using a fixing bracket having the same shape as a shape of the flat zone of the substrate. A substrate is loaded on a rotatable spin head(110). A driving unit rotates the spin head. A spindle(130) is used for connecting the driving unit with the spin head. A fixing bracket(160) is installed at the spin head. The fixing bracket has a contact area corresponding to a flat surface of a flat zone of the substrate in order to prevent vortex flow in a rotating state of the substrate. The fixing bracket has the same shape as the shape of the flat zone of the substrate.