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发明名称
WAFER FÖRDERSYSTEM
摘要
申请公布号
DE60033056(D1)
申请公布日期
2007.03.08
申请号
DE2000633056
申请日期
2000.12.04
申请人
ASYST TECHNOLOGIES INC.
发明人
BONORA, C.;NETSCH, R.;GOULD, RICHARD
分类号
B65G49/07;B65G49/00;G03F7/20;H01L21/00;H01L21/673;H01L21/677;H01L21/68
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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