| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluid controller that is easily installed in a semiconductor manufacturing device and easy to be connected to piping and wiring, can perform flow rate control without any problem even if pulsational fluid flows, and can control a flow rate over a wide flow rate range in detail. <P>SOLUTION: The fluid controller of the present invention includes a fluid control valve which controls the flow rate of the fluid by varying the opening area of a flow passage, a flow rate measuring instrument which measures the flow rate of the fluid, converts a measured value of the flow rate into an electric signal, and outputs the electric signal, and a control unit 6 which outputs a command signal for controlling the opening area of the fluid control valve based upon the deviation of the electric signal from the flow rate measuring instrument from a set flow rate to the fluid control valve or equipment for operating the fluid control valve. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
