Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems

摘要

A seal-protected perimeter partition valve apparatus ( 450 ) defines a vacuum and pressure sealed space ( 401 ) within a larger space ( 540 ) confining a substrate processing chamber with optimized geometry, minimized footprint and 360° substrate accessibility. A compact perimeter partitioned assembly ( 520 ) with seal protected perimeter partition valve ( 450 ) and internally contained substrate placement member ( 480 ) further provides processing system modularity and substantially minimized system footprint.