Josephson-Bauelement und dessen Herstellungsverfahren

摘要

A method of fabricating a Josephson device includes the steps of forming a first superconducting layer (12) and forming a second superconducting layer (15) to form a Josephson junction therebetween, wherein the step of forming the second superconducting layer (15) includes the steps of conducting a first step of forming the second superconducting layer (15) with improved uniformity and conducting a second step of forming the second superconducting layer (15) on the second superconducting layer (15) formed in the first step with improved film quality.